Zhuzhou - Hunan - China
+86-731-22831777
sales@dzsic.com
CVD @ TaC Coating Series
Dezhi advanced materail products cover carbon-based, ceramic and other high-end materials, which are used in all aspects of semiconductor chip manufacturing, such as single crystal growth, epitaxy, etching, diffusion, CVD, PVD, etc.
• High density
• Strong combination
• High purity
• High thermal conductivity
• Erosion resistance
• Resistance to cracking
If you have any questions, please feel free to contact us
Classification
Product Details
Dezhi advanced material products cover carbon-based, ceramic and other high-end materials, used in all aspects of semiconductor chip manufacturing, such as single crystal growth, epitaxy, etching, diffusion, CVD, PVD, etc.
Product Performance:
|
High Temperature Resistance |
High Pressure Resistance |
Wear Resistance |
High Service Life |
Corrosion Resistance |
High Purity |
Materials and Characteristics
|
•Substrate: Sintered SiC (thickness>0.5mm) |
•Coating: TaC (thickness<300μm) |
Application Scenarios
Wafer Fabrication
|
• Single crystal growth |
• Epitaxial |
|
Implementation Technology
|
• Precision Machining (Graphite) |
• Low Pressure Chemical Vapor Deposition (LPCVD) |
Performance Requirements
|
• High density |
• Strong combination |
• High purity |
|
• High thermal conductivity |
• Corrosion resistance |
• Resistance to cracking |
Application Areas
|
• LED Photoelectric |
• Integrated circuits |
• Third-generation semiconductors |
CVD @ TaC Coating Series
Dezhi advanced materail products cover carbon-based, ceramic and other high-end materials, which are used in all aspects of semiconductor chip manufacturing, such as single crystal growth, epitaxy, etching, diffusion, CVD, PVD, etc.
• High density
• Strong combination
• High purity
• High thermal conductivity
• Erosion resistance
• Resistance to cracking
If you have any questions, please feel free to contact us.
Classification
Product Consulting
If you are interested in our service, please leave your email, we will contact you as soon as possible, thank you!
Related Products
The company adheres to the concept of co-creation, sharing and win-win, focusing on the research and development, production and sales of carbon-based, ceramics and high-end materials.
MESSAGE
You are welcome to, we will serve you faithfully!
Contact Us
Add：Plant 1, Hunan Dezhi Semiconductor Industrial Park, 156 Jinma Road, Tianyuan District, Zhuzhou City, Hunan Province.China.
Tel：+86-731-22831777 +86-19973308892( Cooperation )
Dezhi New Material
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